Advanced position encoders in photolithography

Optical lithography has been widely used in the semiconductor industry and many other nanotechnology applications. High-throughput machines are required that keep pace with the demand for ever-decreasing device dimensions. Optical position encoders are constantly improving and are now a compact alternative to laser-interferometer systems in some cases.

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Incremental encoders help optimise the fuel efficiency of aero-engines

HAESL's advanced system for measuring honeycomb seal rings uses Renishaw's TONiC linear and rotary encoders.

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SYMÉTRIE hexapods choose Renishaw’s advanced RESOLUTE™ absolute encoders

Renishaw’s RESOLUTE series of absolute encoders now supports SYMÉTRIE’s Ground Integration and Calibration Support (GICS) and Interferometry Assembly Detection Electronics Assembly (IA DEA) hexapods, designed for two types of advanced component validation

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TONiC™ encoders are key for advanced precision measurement and control

The rapid development of new technologies, such as AI and IoT, has challenged OEMs to develop new manufacturing equipment that caters for the latest advanced semiconductors.

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VAD Instrument chooses Renishaw’s UHV optical encoders for motion platforms

Vacuum technology is used in many high-precision manufacturing processes. Typical applications include semiconductor wafer inspection, wafer bonding, photolithography and thin film deposition.

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RLS encoders and Renishaw help place Dynisma in pole position

Renishaw and RLS provided magnetic encoders and technical support to British-based Dynisma for its latest dynamic motion simulator designed for applications in motorsport and beyond.

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