Ultra-High Vacuum (UHV) optical encoders

Explore the range of Renishaw Ultra-High vacuum (UHV) optical encoders.

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World's first Ultra-High Vacuum (UHV) true-absolute optical encoder

RESOLUTE™ UHV is the latest ultra-high vacuum compatible readhead from Renishaw, offering true-absolute position feedback, sub-micron accuracy and resolutions to 1 nm for both linear and rotary applications.

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VAD Instrument chooses Renishaw’s UHV optical encoders for motion platforms

Vacuum technology is used in many high-precision manufacturing processes. Typical applications include semiconductor wafer inspection, wafer bonding, photolithography and thin film deposition.

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Advanced position encoders in photolithography

Optical lithography has been widely used in the semiconductor industry and many other nanotechnology applications. High-throughput machines are required that keep pace with the demand for ever-decreasing device dimensions. Optical position encoders are co

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Optical encoders and LiDAR scanning

Many of the world’s leading LiDAR (Light Detection and Ranging) manufacturers have developed vehicular LiDAR laser scanning systems, with Renishaw’s high-performance optical encoders onboard, to provide precise and accurate co-ordinate measurement data fo

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Renishaw’s optical encoders selected for 'unique' linear motor

KOVERY is an ultra-precision motor manufacturer based in Gyeonggi-do, South Korea. Renishaw’s latest QUANTiC™ series of incremental encoders are employed in KOVERY linear motors for commutation and position control.

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